Mass Air Flow Sensor - LMM-H04

? Hot Film Anemometer Component
? Highly reliable and long term stable
? Uni-directional airflow measurement
? Fast reaction time
? Manufactured according ISO TS16949
? Can be adapted to various flow channel geometries
? Can be used for almost all kind of gases and volatile substances

  • Model Number: LMM-H04
  • Data Sheet: Date Sheet File
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  • Mass Air Flow Sensor
  • Mass Air Flow Sensor
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Product Specification

LMM-H04 Mass Air Flow Sensor Product Description
LMM-H04 is a thermodynamic sensing element for the unidirectional measurement of mass air flow in a well defined channel. It is intended for applications with high reliability requirements such as automotive, medical or industrial gas flow applications. Mounted directly within the flowing media the LMM-H04 is sensitive against the heat transfer on a micrometer scale. This heat transfer is detected by a micro-machined silicon device which is mounted on ceramic substrate defining the geometry of the sensing element.

The functional principle of the LMM-H04 is a hot film anemometer, which is the thin film version of the hot wire anemometer. A thin film heating element (heater) is heated to a defined temperature difference with respect to the air. At zero flow there is heat dissipation due to the thermal conductivity of the air. With applied flow the heat dissipation increases steadily with the flow rate.

The sensing element can be operated at Constant Power and Constant Voltage mode. However, it is recommended to operate LMM-H04 in the described Constant Temperature Difference (CTD) mode. In the CTD mode the electronics detects any change of the thermal equilibrium very quickly and compensates it by adjusting the power settings through the heaters. This allows a very reliable mass flow measurement with a very short time constant which is in the order of milliseconds.

LMM-H04 Mass Air Flow Sensor Features
? Highly reliable and long term stability
? Fast reaction time
? Can be adapted to various flow channel geometries
? Can be used for almost all kinds of gases and volatile substances

LMM-H04 Mass Air Flow Sensor Applications
? Engine Control
? Industrial gas flow measurement
? Leak detection in pressurized air systems
? Spirometer

LMM-H04 Mass Air Flow Sensor Absolute Maximum Ratings

Parameter Symbol
Condition
Min Typ Max Unit
Storage Temperature TStore
after bonding, with protected bond bads
-40 +25 +125 °C
Storage Temperature
TStore
before bonding, unprotected bond bads
+10 +25 +40 °C
Maximum Current Imax
at now flow, +25 °C ambient
- - 20 mA

LMM-H04 Mass Air Flow Sensor Operation Conditions
Parameter
Symbol
Condition
Min
Typ
Max
Unit
Operation Temperature
TStore
after bonding, with protected bond bads
-40 +25 +125 °C
Heater Overtemperature
? THeate
? THeate = THeater - Tair 

100 120 K

LMM-H04 Mass Air Flow Sensor Sensing Properties
Parameter
Symbol
Condition
Min
Typ
Max
Unit
Resistance
Ambient Temperature Sensor 1
RATS1
Pad 1+2, TAmb = +25 °C
650 850 1050 Ω
Resistance Heater
RHeater1
Pad 3+4, TAmb = +25 °C
40.0
45.0
50.0
Ω
Resistance
Ambient Temperature Sensor 2
RATS2
Pad 5+6, TAmb = +25 °C
1300 1700 2100 Ω
Temperature Coefficient
R ATS and R Heater

measurement at T1 = 0 °C and T2 = +100 °C
5500 6000 6500 ppm/K
TCR Match
?→
measurement at T1 = 0 °C and T2 = +100 °C
- - 100 ppm/K

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