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MEMS Mass Flow Sensors - FS5001L Series

- Low mass flow detectable from 0 ~ 200 sccm up to 0 ~ 6000 sccm
- Response time < 10 ms
- Pressure rating up to 5 bar (73 psi)
- Output: analog or both analog and digital
- Manifold mount of pneumatic connection
- Output: Linear: I2C, Analog 0.5 ~ 4.5 Vdc
- Working Temperature: -10 ~ +55°C

Model Number: FS5001L Series
Data Sheet:

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Product Specification

FS5001L series Mass Flow Sensors Description
The FS5001L mass flow sensors are manufactured using Siargo's proprietary MEMS flow sensor and package technology. the sensors are specially designed for low flow rate range applications from 0~200 sccm to 0~6000 cssm. the maximum flow rate for each model is manufactured via specially designed package as well as smart electronics so that the optimal sensitivity would be achieved.

The packaging enciosure is made of the chemically inert and thermally stable polybutylene terephthalate (PBT) material. The maximum over pressure rating can reach up to 5 bar (73psi) that is benefitted from Siargo's unique MEMS sensor chip structure, special packaging technology andthe rugged senor housing.

The FS5001L can be used in a wide range of applications including mass floe metering for process control, gas flow metrology, heating ventilation and air conditioning solutions as well as medical applications. The FS5001L requires a power supply of 8~24 Vdc and provides an analog output is linearized from 0.5 to 4.5 Vdc corresponding with flow rate from 0 to full scale. The digital output is I2C. The I2C protocol can be obtained from the manufacture.

The calibration is generally performed with air at 20°C and 101.325 kPa pressure rating. It can nonetheless be calibrated with other gases and conditions upon requests.

FS5001L series Mass Flow Sensors Features and Applications
- Low mass flow detectable from 0 ~ 200 sccm up to 0 ~ 6000 sccm
- Response time < 10 ms
- Pressure rating up to 5 bar (73 psi)
- Output: analog or both analog and digital
- Manifold mount of pneumatic connection

FS5001L series Mass Flow Sensors Mechanical Dimensions

FS5001L series Mass Flow Sensors Specifications

Model	FS5001L	Unit
Flow Range	0 ~ 200, 500, 1000 0 ~ 4000, 6000	sccm
Turn-down Ratio	100:1
Accuracy¹	±(2.0 ± 0.5FS)	%
Repeatability	± 0.5	%R eading
Null Shift	± 30	mV
Output Shift	± 0.12	%/°C
Response Time²	10 (Default, 5, 10, 20, 50, 100, 200, 500, 1000 selectable)	ms
Output	Linear: I2C, Analog 0.5 ~ 4.5 Vdc
Pressure Drop³	< 900 <3500	Pa
Working Pressure	-0.08 ~ +0.5	MPa
Power Supply⁴	8 ~ 24 Vdc, 50 mA
Operating Current	20	mA
Power Consumption	<220	mW
Analog Output Load	Sourcing: 25	mA
Analog Output Load	Sinking: 15	mA
Working Temperature	-10 ~ +55	°C

¹ Denotes ±(2.0 %Reading + 0.5 %Full Scale). To obtain accurate flow measurement, let the sensor warm up 1 minute at power up.
² The response time is determined by ADC sampling rate and data process algorithm. The default response time is 10 ms. It can be programmed via I2C communication.
³ The maximum pressure drop is measured at flow rate 1000 sccm. For lower range flow sensors, the pressure drop will be smaller. See section 1.4 for details.
⁴ One DC power supply is necessary. The required minimum output current is 50 mA. The sensor actually consumesless than that in operation.

FS5001L series Mass Flow Sensors Additional Specifications

Pins Out	5 Pin, 2.54 mm centers, 0.635 mm square
Calibration Options	Air @ 20°C, 101.325 kPa
Packaging material	Polybutylene terephthalate (PBT)
Dimensions	40.6 x 36.3 x 1.57	mm³
Weight	15	g
Srorage Temperature	-20 ~ +65	°C
Humidity	<95 %RH (No icing or condensation)
Maximum Overflow	3 18	SLPM
Maximum Flow Change	500 3000	sccm/sec