Thermal Mass Flow Sensor - FS7.4W

Dimensions (L x W x H / H2 in mm)*

6.9 x 2.4 x 0.20 / 0.60

Operating measuring range

0 m/s to 100 m/s

Response sensitivity

0.01 m/s

Accuracy

< 3 % of the measured value (dependent on the

electronics and calibration)

Response time t₆₃

~200 ms (jump from 0 to 10000 sccm)

Operating temperature range*

-20℃ to +400℃

Temperature sensitivity

< 0.1 %/K (dependent on the electronics)

Connection*

3 pins, Pt/Ni-wire, ? 0.2 mm, 15 mm

Heater*

R_H (0℃) = 45 Ω ±1 %

Reference element*

R_s (0℃) = 1200 Ω ±1 %

Voltage range (nominal)*

2 V to 5 V (at ? T = 30 K (0 m/s ≤ vgas ≤ 100 m/s)

Maximum heater voltage*

3 V (at 0 m/s)