Thermal Mass Flow Sensor - FS7

Dimensions (L x W x H / H2 in mm)*

6.9 x 2.4 x 0.20 / 0.60

? 6.0 (±0.1) mm, LH = 14 (±0.2) mm (complete

dimensions in application note)

Operating measuring range

0 m/s to 100 m/s

Response sensitivity

0.01 m/s

Accuracy

< 3 % of the measured value (dependent on the

electronics and calibration)

Response time t₆₃

~200 ms (jump from 0 to 10000 sccm)

Operating temperature range*

-20℃ to +150℃

Temperature sensitivity

< 0.1 %/K (dependent on the electronics)

Connection*

3 pins, AWG 30/7, stranded wire, insulated with PTFE

Heater*

R_H (0℃) = 45 Ω ±1 %

Reference element*

R_s (0℃) = 1200 Ω ±1 %

Voltage range (nominal)*

2 V to 5 V (at ? T = 30 K (0 m/s ≤V_gas ≤ 100 m/s)

Maximum heater voltage*

3 V (at 0 m/s)

Alternative construction*

Moulded plastic housing