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Piezoresistive Silicon Pressure Sensor - SPA401 Series

? 1.5 to 100 PSI
? -40 to 125°C Temperature Range
? Calibrated and compensated Output
? Supply voltage 2.7 to 5.5VDC
? High accuracy
? Medical Devices
? Process Control & Monitoring Systems
? Environmental Controls
? HVAC
? Laboratory & Calibration Applications

Model Number: SPA401 Series
Data Sheet:

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Product Specification

Piezoresistive Silicon Pressure Sensor Module

SPA401 Series Pressure Sensors General Description
The SPA 401 Series offers piezoresistive silicon, stainless steel pressure sensors. Product highlights include excellent overpressure characteristics and chemical resistance. Media isolated sensors are designed to operate in hostile environments and yet give the outstanding sensitivity, linearity, and hysteresis of a silicon sensor. This pressure sensor is compatible with 316L stainless steel, a type of steel that increases corrosion resistance, improves resistance to pitting from chloride ion solutions, and provides increased strength at high temperatures.

The sensor chip is housed in a fluid-filled cylindrical cavity and isolated from measured media by a stainless steel diaphragm and body. The oil-filled cavity in this unique design of pressure sensor is at a minimum volume so the accuracy is greatly improved. The SPA 401 silicon pressure sensor is a thermally compensated device and has am amplified output with a ratiometric output signal (10% to 90% of supply voltage). This new pressure sensor offers design engineers excellent performance in various applications, especially for low pressure and smaller solutions.

SPA401 Series Pressure Sensors Features
? 1.5 to 100 PSI
? -40 to 125°C Temperature Range
? Calibrated and compensated Output
? Supply voltage 2.7 to 5.5VDC
? High accuracy (max 0.25% linearity and max 0.05% hysteresis)

SPA401 Series Pressure Sensors Applications
? Industrial
? Vacuum technology
? Pneumatic and hydraulic components (e.g. valves, pumps)
? Level measuring (e.g. environmental technology)

SPA401 Series Pressure Sensors Specifications
All parameters are measured at supply voltage 5V reference conditions unless otherwise specified

Standard Pressure Ranges
PSI	bar	Output signal (Offset)		Output signal (FSO)		Proof pressure [PSI/bar]		Negative pressure [PSI/bar]		Burst pressure [PSI/bar]
			@ Vs = 5 V		@ Vs = 5 V
1.5	0.1	10 % V_s	0.5 V	90 % V_s	4.5 V	15	1	-15	-1	22	≥ 1.5
3	0.2					30	2	-15	-1	45	≥ 3
5	0.35					30	2	-15	-1	45	≥ 3
15	1					75	5	-15	-1	112	≥ 7.5
30	2					150	10	-15	-1	225	≥ 15
50	3.5					250	17.5	-15	-1	375	≥ 25
100	7					500	35	-15	-1	750	≥ 50
Supply / Performance
			min.			typ.			max.
Supply voltage Vs [V]			2.7			5.0			5.5
Current consumption [mA]			2.5 max.
Linearity [% FSO BFSL]			- 0.25			±0.1			0.25
Hysteresis [%FS0]			- 0.1			±0.05			0.1
Output load resistance [k?]			≥ 5
Insulation resistance [M?]			50 (between housing and sensor chip) @ 50 V DC
Thermal errors
				p_n ≤ 5 psi				p_n ≤ 5 psi
Thermal error offset [% FSO]				≤ ±1.0				≤ ±0.75
Thermal error span [% FSO]				≤ ±1.0				≤ ±0.75
				0 to 70 °C (32 to 158 °F)				0 to 85 °C (32 to 185 °F)
Operating temperature ranges
Media			-40 to 125 °C (-40 to 257 °F)
Storage			-40 to 125 °C (-40 to 257 °F)
Mechanical stability
Vibration			10 g RMS (20 to 2000 Hz)
Schock			100 g / 11 ms
Electrical connections
Standard			JST connector
Materials / Filling fluids
Housing			Stainless steel 316L (1.4404)
Diaphragm			Stainless steel 316L (1.4435)
Media wetted parts			Housing, diaphragm
Filling liquid			Silicone oil
Miscellaneous
Installation position			any
Protection class			IP 00
Weight			Standard: approx. 10 g
Sealing			O-Ring 15.5 x 1.5 (material: FKM)